LIGHT DETECTION DEVICE, LIGHT DETECTION SYSTEM, RIDER DEVICE, MOVABLE BODY, INSPECTION METHOD, AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

• Main Authors: SUZUKI KAZUHIRO, OKAMOTO KAZUAKI, KWON HONAM
• Format: Patent
• Language: English; Japanese
• Published: 02.10.2023
• Subjects: ANALOGOUS ARRANGEMENTS USING OTHER WAVES; BASIC ELECTRIC ELEMENTS; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION ORRERADIATION OF RADIO WAVES; MEASURING; PHYSICS; RADIO DIRECTION-FINDING; RADIO NAVIGATION; SEMICONDUCTOR DEVICES; TESTING

To provide a light detection device, a light detection system, a rider device, a movable body, an inspection method, and a manufacturing method of a semiconductor device, capable of more easily performing an inspection.SOLUTION: A light detection device according to an embodiment includes a first region, a second region, a first electrode, and a second electrode. The first region includes a plurality of first semiconductor light detection elements, and a plurality of first lenses respectively provided on the plurality of first semiconductor light detection elements. The second region includes a plurality of second semiconductor light detection elements, no lens being located directly above the plurality of second semiconductor light detection elements at a position in a first direction that is the same direction of the plurality of first lenses. The first direction is a direction from one of the plurality of first semiconductor light detection elements toward one of the plurality of first lenses. The first electrode is electrically connected to the plurality of first semiconductor light detection elements. The second electrode is electrically connected to the plurality of second semiconductor light detection elements.SELECTED DRAWING: Figure 1 【課題】より簡便に検査可能な、光検知装置、光検出システム、ライダー装置、移動体、検査方法、及び半導体装置の製造方法を提供する。【解決手段】実施形態に係る光検知装置は、第１領域と、第２領域と、第１電極と、第２電極と、を含む。前記第１領域は、複数の第１半導体光検知素子と、前記複数の第１半導体光検知素子の上にそれぞれ設けられた複数の第１レンズと、を含む。前記第２領域は、複数の第２半導体光検知素子を含む。前記第１レンズと同じ第１方向の位置において、前記複数の第２半導体光検知素子の直上には、レンズが設けられていない。前記第１方向は、前記複数の第１半導体光検知素子の１つから前記複数の第１レンズの１つに向かう方向である。前記第１電極は、前記複数の第１半導体光検知素子と電気的に接続されている。前記第２電極は、前記複数の第２半導体光検知素子と電気的に接続されている。【選択図】図１