IMAGING APPARATUS AND IMAGE GENERATION METHOD

• Main Author: YAMANE TAKESHI
• Format: Patent
• Language: English; Japanese
• Published: 18.05.2023
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASUREMENT OF NUCLEAR OR X-RADIATION; MEASURING; PHYSICS; TESTING

To provide an imaging apparatus and an image generation method which can highly accurately acquire a restructured image.SOLUTION: An imaging apparatus comprises: a circular disk 21 with opening which is formed with an opening 211 through which X-rays pass; and a vacuum suction ring 24 which has an inner peripheral ring 242 and an outer peripheral ring 241 having different heights and fixes a position of the opening 211 with respect to a subject 41. The imaging apparatus further comprises: a rotary stage 22 which holds the subject 41 and the circular disk 21 with opening fixed by the vacuum suction ring 24 and can rotate at a desired angle around a rotary shaft 221 along a direction vertical to a surface of the subject 41; and a primary detector 14 in which line-shaped pixels are arranged in a prescribed pixel pitch. The imaging apparatus also comprises: an image forming mirror 13 which forms an image of the X-rays passing through the subject 41 and the opening 211 in the primary detector 14; and a control analysis unit 31 which corrects coordinates of an image intensity profile detected by the primary detector 14 to reconstruct the image of the subject from the corrected image intensity profile.SELECTED DRAWING: Figure 1 【課題】高精度に再構成像を取得することができる、撮像装置、及び、画像生成方法を提供する。【解決手段】撮像装置は、Ｘ線が透過可能な開口２１１が形成された開口付き円板２１と、高さの異なる内周リング２４２と外周リング２４１とを有し、被検体４１に対する開口２１１の位置を固定する真空吸着リング２４を備える。更に、真空吸着リング２４によって固定された被検体４１と開口付き円板２１を保持し被検体４１の表面に対して垂直な方向に沿った回転軸２２１を中心に所望の角度に回転可能な回転ステージ２２と、ライン状画素を所定の画素ピッチで配置してなる１次元検出器１４とも備える。また、被検体４１及び開口２１１を透過するＸ線を１次元検出器１４に結像させる結像ミラー１３と、１次元検出器１４で検出された像強度プロファイルの座標を補正し、補正後の像強度プロファイルから前記被検体の像を再構成する制御解析部３１とを備える。【選択図】図１