PHOTOELECTRIC CONVERSION DEVICE

• Main Authors: SUZUKI TAKAYUKI, TORII KEITA, MAEHASHI YU, IWATA JUNJI
• Format: Patent
• Language: English; Japanese
• Published: 20.04.2023
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC COMMUNICATION TECHNIQUE; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; PICTORIAL COMMUNICATION, e.g. TELEVISION; SEMICONDUCTOR DEVICES

To provide a photoelectric conversion device that can further improve sensitivity.SOLUTION: A photoelectric conversion device includes a substrate, a photoelectric conversion unit arranged in the substrate and generating an electric charge according to incident light, and a pixel separation unit arranged in the substrate and separating the photoelectric conversion unit from other elements, and a side wall of the pixel separation unit has a plurality of unevennesses in a cross-sectional view, and the period of at least a part of the plurality of unevennesses is larger than 1/2 of the wavelength of light to which the photoelectric conversion unit is sensitive.SELECTED DRAWING: Figure 7 【課題】感度をより向上し得る光電変換装置を提供する。【解決手段】基板と、前記基板内に配され、入射光に応じた電荷を生成する光電変換部と、前記基板内に配され、前記光電変換部を他の素子から分離する画素分離部と、を有し、前記画素分離部の側壁は、断面視において、複数の凹凸を有し、前記複数の凹凸の少なくとも一部の周期は、前記光電変換部が感度を有する光の波長の１／２よりも大きい。【選択図】図７