RESIST COMPOSITION AND RESIST PATTERN FORMING METHOD

• Main Authors: ODASHIMA RIN, TODOROKI SEIJI, FUJINAMI TETSURO
• Format: Patent
• Language: English; Japanese
• Published: 27.12.2022
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CHEMISTRY; CINEMATOGRAPHY; COMPOSITIONS BASED THEREON; ELECTROGRAPHY; HOLOGRAPHY; MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVINGCARBON-TO-CARBON UNSATURATED BONDS; MATERIALS THEREFOR; METALLURGY; ORGANIC MACROMOLECULAR COMPOUNDS; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; THEIR PREPARATION OR CHEMICAL WORKING-UP

To provide a resist composition excellent in all of sensitivity, roughness, and resolution, and a resist pattern forming method.SOLUTION: The resist composition contains: a resin component (A1) having a constituent unit (a0) which contains a lactone-containing cyclic group containing an acid-dissociable group, an -SO2-containing cyclic group containing an acid-dissociable group, or a carbonate-containing cyclic group containing an acid-dissociable group; and a compound (B0) represented by formula (b0). X0 represents a bromine atom or an iodine atom; Rm represents a hydroxy group, an alkyl group, a fluorine atom or a chlorine atom; nb1 represents an integer of 1-5; nb2 represents an integer of 0-4; 1≤nb1+nb2≤5; Yb0 represents a divalent linking group or a single bond; Vb0 represents a single bond, an alkylene group or a fluorinated alkylene group; R0 represents a hydrogen atom, a C1-5 fluorinated alkyl group or a fluorine atom; Mm+ represents an m-valent organic cation; and m represents an integer of 1 or more.SELECTED DRAWING: None 【課題】感度、ラフネス、及び解像性がいずれも良好なレジスト組成物及びレジストパターン形成方法の提供。【解決手段】酸解離性基を含むラクトン含有環式基、酸解離性基を含む－ＳＯ２－含有環式基、又は酸解離性基を含むカーボネート含有環式基を含む構成単位（ａ０）を有する樹脂成分（Ａ１）と、式（ｂ０）で表される化合物（Ｂ０）と、を含有しする、レジスト組成物。Ｘ０は、臭素原子又はヨウ素原子。Ｒｍは、ヒドロキシ基、アルキル基、フッ素原子、又は、塩素原子。ｎｂ１は１～５の整数。ｎｂ２は０～４の整数。１≦ｎｂ１＋ｎｂ２≦５る。Ｙｂ０は、２価の連結基又は単結合。Ｖｂ０は、単結合、アルキレン基又はフッ素化アルキレン基で。Ｒ０は、水素原子、炭素原子数１～５のフッ素化アルキル基又はフッ素原子。Ｍｍ＋は、ｍ価の有機カチオン。ｍは１以上の整数。［化１］TIFF2022191046000096.tif35170【選択図】なし