INSPECTION DEVICE, INSPECTION METHOD AND PROGRAM

• Main Authors: YAMAGOSHI TOMOKI, MUTO KOKI, TODA MASATAKA, AOKI KIMIYA, MIYANAGA YUSUKE, ICHIKAWA HIRONOBU
• Format: Patent
• Language: English; Japanese
• Published: 24.08.2022
• Subjects: CALCULATING; COMPUTING; COUNTING; IMAGE DATA PROCESSING OR GENERATION, IN GENERAL; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

To highly accurately inspect a defect using a photographed image for an inspection object and suppress a data amount to be used at a low level.SOLUTION: An inspection device according to an embodiment comprises: an acquisition unit which acquires a plurality of photographed images obtained by imagin...