INSPECTION DEVICE, INSPECTION METHOD AND PROGRAM

To highly accurately inspect a defect using a photographed image for an inspection object and suppress a data amount to be used at a low level.SOLUTION: An inspection device according to an embodiment comprises: an acquisition unit which acquires a plurality of photographed images obtained by imagin...

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Bibliographic Details
Main Authors YAMAGOSHI TOMOKI, MUTO KOKI, TODA MASATAKA, AOKI KIMIYA, MIYANAGA YUSUKE, ICHIKAWA HIRONOBU
Format Patent
LanguageEnglish
Japanese
Published 24.08.2022
Subjects
CALCULATING
COMPUTING
COUNTING
IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Summary:To highly accurately inspect a defect using a photographed image for an inspection object and suppress a data amount to be used at a low level.SOLUTION: An inspection device according to an embodiment comprises: an acquisition unit which acquires a plurality of photographed images obtained by imaging an inspection object from plural angles; an application unit which applies a label according to the corresponding angle to each of the photographed images; a learning processing unit which learns a neural network including an encoder that generates a latent variable by inputting the photographed image as an input image and the corresponding label and a decoder that generates a restored image by inputting the label and the latent variable such that the input image and the restored image become the same; and an inspection processing unit which performs inspection processing of a defect of the inspection object on the basis of a difference between the inspection image and a restored inspection image being the restored image obtained by inputting the photographed image as the inspection image and the corresponding label to the neural network in the inspection of the inspection object.SELECTED DRAWING: Figure 3 【課題】検査対象物について撮影画像を用いて高精度に欠陥を検査するとともに使用するデータ量を少なく抑える。【解決手段】実施形態の検査装置は、一例として、検査対象物を複数の角度から撮影して得られた複数の撮影画像を取得する取得部と、撮影画像のそれぞれに対して、対応する角度に応じたラベルを付与する付与部と、入力画像としての撮影画像および対応するラベルを入力して潜在変数を生成するエンコーダ、ならびに、ラベルおよび潜在変数を入力して復元画像を生成するデコーダを含むニューラルネットワークを、入力画像と復元画像が同じになるように学習する学習処理部と、検査対象物の検査時に、検査画像としての撮影画像および対応するラベルをニューラルネットワークに入力することによって得られた復元画像である復元検査画像と、検査画像と、の差分に基づいて、検査対象物の欠陥の検査処理を行う検査処理部と、を備える。【選択図】図３
Bibliography:Application Number: JP20210021238