CONTROL DEVICE

• Main Authors: KONDO AKIRA, WATANABE MARINO, YOSHIDA TATSUYA, HAMADA SHINYA
• Format: Patent
• Language: English; Japanese
• Published: 27.07.2022
• Subjects: ACTUATING-FLOATS; BLASTING; COCKS; CONTROL OR REGULATING SYSTEMS IN GENERAL; CONTROLLING; DEVICES FOR VENTING OR AERATING; ENGINEERING ELEMENTS AND UNITS; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS; HEATING; LIGHTING; MECHANICAL ENGINEERING; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS; PHYSICS; REGULATING; SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES; TAPS; THERMAL INSULATION IN GENERAL; VALVES; WEAPONS

To provide a technique that is able to improve the controllability of a control target to/from which a gas is supplied/discharged by a spool type flow rate control valve.SOLUTION: By controlling the respective flow rates of supply and discharge of a gas by means of a spool type flow rate control valve for a control target, a control device controls an amount of control of the control target so that the amount becomes equal to a target value. The control device includes: a controller that generates a spool position command for the spool type flow rate control valve, based on the target value; and a nonlinear compensator that applies a correction for linearly compensating for a nonlinear flow rate characteristic of the spool type flow rate control valve to the generated spool position command and outputs it to the spool type flow rate control valve.SELECTED DRAWING: Figure 6 【課題】スプール型流量制御弁により気体が給排気される制御対象の制御性を向上できる技術を提供する。【解決手段】制御装置は、制御対象に対するスプール型流量制御弁による気体の給排の流量を制御することによって当該制御対象の制御量を目標値へと制御する。制御装置は、目標値に基づいてスプール型流量制御弁のスプール位置指令を生成する制御器と、生成されたスプール位置指令に、スプール型流量制御弁の非線形な流量特性を線形補償するための補正を適用し、スプール型流量制御弁に出力する非線形補償器と、を備える。【選択図】図６