POWDER CARRYING DEVICE, GAS SUPPLY DEVICE AND POWDER ELIMINATION METHOD

To provide a powder carrying device suppressed in internal leak, a gas supply device and a powder elimination method.SOLUTION: A powder carrying device has: a powder carrying pipe connected from a powder raw material supply source to a vaporizer; a first valve provided at the powder raw material sup...

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Main Author KOMORI EIICHI
Format Patent
LanguageEnglish
Japanese
Published 08.04.2022
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Abstract To provide a powder carrying device suppressed in internal leak, a gas supply device and a powder elimination method.SOLUTION: A powder carrying device has: a powder carrying pipe connected from a powder raw material supply source to a vaporizer; a first valve provided at the powder raw material supply source side of the powder carrying pipe; a second valve provided at the vaporizer side of the powder carrying pipe; a buffer tank filled with purge gas; a first purge gas supply pipe connected to the powder carrying pipe upstream the second valve and supplying the purge gas from the buffer tank to the second valve; a first purge gas valve provided to the first purge gas supply pipe; and a control part controlling opening/closing of the first valve, the second valve and the first purge gas valve.SELECTED DRAWING: Figure 8 【課題】内部リークを抑制する粉体搬送装置、ガス供給装置及び粉体除去方法を提供する。【解決手段】粉体原料供給源から気化器に接続する粉体搬送配管と、前記粉体搬送配管の前記粉体原料供給源の側に設けられる第1バルブと、前記粉体搬送配管の前記気化器の側に設けられる第2バルブと、パージガスを充填するバッファタンクと、前記第2バルブよりも上流側で前記粉体搬送配管と接続し、前記バッファタンクから前記第2バルブにパージガスを供給する第1パージガス供給配管と、前記第1パージガス供給配管に設けられる第1パージガスバルブと、記第1バルブ、前記第2バルブ及び前記第1パージガスバルブの開閉を制御する制御部と、を備える、粉体搬送装置。【選択図】図8
AbstractList To provide a powder carrying device suppressed in internal leak, a gas supply device and a powder elimination method.SOLUTION: A powder carrying device has: a powder carrying pipe connected from a powder raw material supply source to a vaporizer; a first valve provided at the powder raw material supply source side of the powder carrying pipe; a second valve provided at the vaporizer side of the powder carrying pipe; a buffer tank filled with purge gas; a first purge gas supply pipe connected to the powder carrying pipe upstream the second valve and supplying the purge gas from the buffer tank to the second valve; a first purge gas valve provided to the first purge gas supply pipe; and a control part controlling opening/closing of the first valve, the second valve and the first purge gas valve.SELECTED DRAWING: Figure 8 【課題】内部リークを抑制する粉体搬送装置、ガス供給装置及び粉体除去方法を提供する。【解決手段】粉体原料供給源から気化器に接続する粉体搬送配管と、前記粉体搬送配管の前記粉体原料供給源の側に設けられる第1バルブと、前記粉体搬送配管の前記気化器の側に設けられる第2バルブと、パージガスを充填するバッファタンクと、前記第2バルブよりも上流側で前記粉体搬送配管と接続し、前記バッファタンクから前記第2バルブにパージガスを供給する第1パージガス供給配管と、前記第1パージガス供給配管に設けられる第1パージガスバルブと、記第1バルブ、前記第2バルブ及び前記第1パージガスバルブの開閉を制御する制御部と、を備える、粉体搬送装置。【選択図】図8
Author KOMORI EIICHI
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Snippet To provide a powder carrying device suppressed in internal leak, a gas supply device and a powder elimination method.SOLUTION: A powder carrying device has: a...
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SourceType Open Access Repository
SubjectTerms CONVEYING
HANDLING THIN OR FILAMENTARY MATERIAL
PACKING
PERFORMING OPERATIONS
PNEUMATIC TUBE CONVEYORS
SHOP CONVEYOR SYSTEMS
STORING
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING
TRANSPORTING
Title POWDER CARRYING DEVICE, GAS SUPPLY DEVICE AND POWDER ELIMINATION METHOD
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