POWDER CARRYING DEVICE, GAS SUPPLY DEVICE AND POWDER ELIMINATION METHOD
To provide a powder carrying device suppressed in internal leak, a gas supply device and a powder elimination method.SOLUTION: A powder carrying device has: a powder carrying pipe connected from a powder raw material supply source to a vaporizer; a first valve provided at the powder raw material sup...
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Format | Patent |
Language | English Japanese |
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08.04.2022
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Abstract | To provide a powder carrying device suppressed in internal leak, a gas supply device and a powder elimination method.SOLUTION: A powder carrying device has: a powder carrying pipe connected from a powder raw material supply source to a vaporizer; a first valve provided at the powder raw material supply source side of the powder carrying pipe; a second valve provided at the vaporizer side of the powder carrying pipe; a buffer tank filled with purge gas; a first purge gas supply pipe connected to the powder carrying pipe upstream the second valve and supplying the purge gas from the buffer tank to the second valve; a first purge gas valve provided to the first purge gas supply pipe; and a control part controlling opening/closing of the first valve, the second valve and the first purge gas valve.SELECTED DRAWING: Figure 8
【課題】内部リークを抑制する粉体搬送装置、ガス供給装置及び粉体除去方法を提供する。【解決手段】粉体原料供給源から気化器に接続する粉体搬送配管と、前記粉体搬送配管の前記粉体原料供給源の側に設けられる第1バルブと、前記粉体搬送配管の前記気化器の側に設けられる第2バルブと、パージガスを充填するバッファタンクと、前記第2バルブよりも上流側で前記粉体搬送配管と接続し、前記バッファタンクから前記第2バルブにパージガスを供給する第1パージガス供給配管と、前記第1パージガス供給配管に設けられる第1パージガスバルブと、記第1バルブ、前記第2バルブ及び前記第1パージガスバルブの開閉を制御する制御部と、を備える、粉体搬送装置。【選択図】図8 |
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AbstractList | To provide a powder carrying device suppressed in internal leak, a gas supply device and a powder elimination method.SOLUTION: A powder carrying device has: a powder carrying pipe connected from a powder raw material supply source to a vaporizer; a first valve provided at the powder raw material supply source side of the powder carrying pipe; a second valve provided at the vaporizer side of the powder carrying pipe; a buffer tank filled with purge gas; a first purge gas supply pipe connected to the powder carrying pipe upstream the second valve and supplying the purge gas from the buffer tank to the second valve; a first purge gas valve provided to the first purge gas supply pipe; and a control part controlling opening/closing of the first valve, the second valve and the first purge gas valve.SELECTED DRAWING: Figure 8
【課題】内部リークを抑制する粉体搬送装置、ガス供給装置及び粉体除去方法を提供する。【解決手段】粉体原料供給源から気化器に接続する粉体搬送配管と、前記粉体搬送配管の前記粉体原料供給源の側に設けられる第1バルブと、前記粉体搬送配管の前記気化器の側に設けられる第2バルブと、パージガスを充填するバッファタンクと、前記第2バルブよりも上流側で前記粉体搬送配管と接続し、前記バッファタンクから前記第2バルブにパージガスを供給する第1パージガス供給配管と、前記第1パージガス供給配管に設けられる第1パージガスバルブと、記第1バルブ、前記第2バルブ及び前記第1パージガスバルブの開閉を制御する制御部と、を備える、粉体搬送装置。【選択図】図8 |
Author | KOMORI EIICHI |
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DocumentTitleAlternate | 粉体搬送装置、ガス供給装置及び粉体除去方法 |
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RelatedCompanies | TOKYO ELECTRON LTD |
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Snippet | To provide a powder carrying device suppressed in internal leak, a gas supply device and a powder elimination method.SOLUTION: A powder carrying device has: a... |
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SubjectTerms | CONVEYING HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING |
Title | POWDER CARRYING DEVICE, GAS SUPPLY DEVICE AND POWDER ELIMINATION METHOD |
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