PIEZOELECTRIC FILM ELEMENT AND PIEZOELECTRIC FILM VIBRATOR

• Main Authors: SOYAMA NOBUYUKI, DOI TOSHIHIRO
• Format: Patent
• Language: English; Japanese
• Published: 17.03.2022
• Subjects: ELECTRICITY

To provide novel piezoelectric film element and piezoelectric film vibrator including an electrode whose conductivity decreases less easily even after heating under an oxidative atmosphere and a PZT piezoelectric film with high orientation and the excellent piezoelectric characteristic.SOLUTION: A piezoelectric film element includes a substrate, a first electrode layer including ruthenium and/or ruthenium oxide disposed on the substrate, an oxide layer with a perovskite structure oriented on a (100) surface disposed on the first electrode layer, and a piezoelectric film with a perovskite structure containing zinc, zirconium, and titanium disposed on the oxide layer.SELECTED DRAWING: Figure 1 【課題】酸化雰囲気下で加熱しても導電性が低下しにくい電極と、配向性が高く、圧電特性に優れるＰＺＴ系圧電膜とを有する新規な圧電膜素子及び圧電膜振動子を提供する。【解決手段】基板と、前記基板の上に配置されたルテニウム及び／又は酸化ルテニウムを含む第一電極層と、前記第一電極層の上に配置された（１００）面に配向したペロブスカイト構造を有する酸化物層と、前記酸化物層の上に配置された鉛、ジルコニウム及びチタンを含むペロブスカイト構造を有する圧電膜と、を含む圧電膜素子。【選択図】図１