SEMICONDUCTOR STORAGE DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR STORAGE DEVICE
To provide a semiconductor storage device capable of improving electric characteristics, and a method for manufacturing the semiconductor storage device.SOLUTION: A semiconductor storage device of an embodiment comprises a substrate, a charge holding unit, and a channel layer. At least a part of the...
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Main Authors | , , , , |
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Format | Patent |
Language | English Japanese |
Published |
10.03.2022
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Subjects | |
Online Access | Get full text |
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