SEMICONDUCTOR STORAGE DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR STORAGE DEVICE

• Main Authors: HAMADA TATSUFUMI, KUKI TOMOHIRO, MANNO YOSUKE, TSUDA MUNEYUKI, SAOTOME SHINICHI
• Format: Patent
• Language: English; Japanese
• Published: 10.03.2022
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

To provide a semiconductor storage device capable of improving electric characteristics, and a method for manufacturing the semiconductor storage device.SOLUTION: A semiconductor storage device of an embodiment comprises a substrate, a charge holding unit, and a channel layer. At least a part of the...