METHOD, DEVICE, AND SYSTEM FOR INSPECTING SURFACE

• Main Authors: FUKUDA KUNIHIRO, MARUYAMA SHIGENOBU, MO HANKI, HARIYAMA TATSUO, TOYOUCHI TETSUYA
• Format: Patent
• Language: English; Japanese
• Published: 09.02.2022
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

To provide a method, a device, and a system for inspecting a surface that does not make a false detection, can stably detect uneven nitriding without depending on the size and the shape of uneven nitriding and can evaluate the shape and the size of a defect at the same time.SOLUTION: The present inv...