METHOD, DEVICE, AND SYSTEM FOR INSPECTING SURFACE

• Main Authors: FUKUDA KUNIHIRO, MARUYAMA SHIGENOBU, MO HANKI, HARIYAMA TATSUO, TOYOUCHI TETSUYA
• Format: Patent
• Language: English; Japanese
• Published: 09.02.2022
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

To provide a method, a device, and a system for inspecting a surface that does not make a false detection, can stably detect uneven nitriding without depending on the size and the shape of uneven nitriding and can evaluate the shape and the size of a defect at the same time.SOLUTION: The present invention includes: an optical system as a first optical system for irradiating the surface of a piston with a first illumination light (a coherent light) and taking an image formed by projection of the reflected light of the coherent light on a screen, thereby detecting an irregular shape; and an optical system as a second optical system for irradiating the surface of a piston with a second illumination light (a non-coherent light) and taking an image of the surface reflection light of the non-coherent light, thereby detecting a reflectance distribution. The optical images of the first and second optical systems are compared so that defects and non-defects are extracted and discriminated.SELECTED DRAWING: Figure 1 【課題】非欠陥を誤検出せず、かつ窒化むらのサイズ・形状に依存することなく安定的に窒化むらを検出し、同時に欠陥形状・寸法の評価が可能な表面検査方法、表面検査装置、および表面検査システムを提供する。【解決手段】第１の光学系として第１の照明光（コヒーレント光）をピストン表面に照射し、その反射光のスクリーンへの投影像を撮像することで凹凸形状を検出する光学系と、第２の光学系として第２の照明光（非コヒーレント光）をピストン表面に照射し、その表面反射光を撮像することで反射率分布を検出する光学系とを備え、第１、第２の光学系の光学像を比較することで、欠陥と非欠陥を抽出・弁別する。【選択図】図１