PELLICLE CASE, HOLDING UNIT AND RELEASE FILM

• Main Authors: KUROKAWA KENICHI, MAEDA TAKURO, TANI NORIKO, TANAKA TOMOKAZU, MITSUMORI YUJI, HIRANO MASAKATSU
• Format: Patent
• Language: English; Japanese
• Published: 02.12.2021
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS

To provide a pellicle case that can suitably hold a pellicle in a case during storage and transport and allows the pellicle to be suitably taken out of the case without the scattering of paste, and a holding unit and a release film.SOLUTION: A pellicle case stores a pellicle having an adhesive layer disposed on one end face side of a frame and a release film disposed so as to cover the adhesive layer. The pellicle case has a tray that allows the pellicle to be mounted thereon with the release film side of the pellicle facing the tray, and a non-adhesive holding unit that holds the release film on the tray side, thereby holding the pellicle on the tray side.SELECTED DRAWING: Figure 4 【課題】保管、輸送時には、ペリクルをケースに好適に保持することができ、他方、取り出す際には糊飛びなくペリクルをケースから好適に取り出すことができる、ペリクルケース、保持ユニットおよび剥離フィルムを提供すること【解決手段】フレームの一端面側に配された粘着層、及び粘着層を覆うように配された剥離フィルムを有するペリクルを収納するペリクルケースであって、ペリクルを剥離フィルム側を対向させて載置するためのトレイ、及び、剥離フィルムをトレイ側に保持することによりペリクルをトレイ側に保持する、非粘着性の保持ユニットを備える、ペリクルケース。【選択図】図４