MEASUREMENT DEVICE

To correct calibration data to an appropriate value without interrupting a width measurement even when an optical layout changes in a measurement device measuring a width of an object to be measured, and to suppress a measurement error.SOLUTION: A measurement device comprises: a light source; a line...

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Bibliographic Details
Main Authors NAKAO TSUTOMU, TAKEMURA SHOTA
Format Patent
LanguageEnglish
Japanese
Published 18.11.2021
Subjects
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