CAPACITOR, SUBSTRATE FOR CAPACITOR, AND MANUFACTURING METHOD THEREOF

• Main Authors: GOTO MASAHIRO, SEKIGUCHI HIROSHI, YOSHIOKA HIDENORI
• Format: Patent
• Language: English; Japanese
• Published: 13.09.2021
• Subjects: BASIC ELECTRIC ELEMENTS; CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES ORLIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

To provide a capacitor that can achieve both ease of manufacture and increased capacity, a substrate for the capacitor, and a manufacturing method thereof.SOLUTION: A capacitor includes a base material provided at a predetermined pitch along a first direction and having a plurality of protrusions protruding toward a second direction so as to have a predetermined height along the second direction intersecting the first direction, at least one conductor layer located on the second direction side with respect to the base material, and at least one dielectric layer located on the second direction side with respect to the base material, and the side surface of the protrusion has an inclined surface inclined with respect to the second direction such that the width of the protrusion along the first direction becomes smaller toward the second direction, and the height of the protrusion is more than the pitch of the protrusion.SELECTED DRAWING: Figure 1 【課題】製造の容易性と容量の増大とを両立させることができるキャパシタ、キャパシタ用基材及びキャパシタの製造方法を提供する。【解決手段】キャパシタは、第１方向に沿って所定のピッチで設けられ、第１方向に交差する第２方向に沿って所定の高さを有するように第２方向側に突出した複数の凸部を有する基材と、基材に対して第２方向側に位置する少なくとも１つの導電体層と、基材に対して第２方向側に位置する少なくとも１つの誘電体層と、を備え、凸部の側面は、第２方向に向かうにしたがって第１方向に沿った凸部の幅が小さくなるように第２方向に対して傾斜した傾斜面を有し、凸部の高さは、凸部のピッチ以上である。【選択図】図１