AUTOMATIC POLISHING SYSTEM

• Main Authors: HAYASHI KEIICHI, SUZUKI HIROYUKI, YAMASHITA TOMOO, NAKAYAMA GENJI, AZUMA YOSHIO
• Format: Patent
• Language: English; Japanese
• Published: 02.09.2021
• Subjects: DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS; GRINDING; MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; PERFORMING OPERATIONS; POLISHING; TRANSPORTING

To provide an automatic polishing system which can make a thickness of a polished film uniform during polishing processing.SOLUTION: An automatic polishing system includes a polishing tool which has a polishing material for polishing a polishing object area and a motor for driving the polishing material, a polishing robot which moves the polishing tool with respect to the polishing object area, and a polishing controller for controlling the polishing tool and the polishing robot. The automatic polishing system includes a current measurement device for measuring a current consumption value of the motor, and a pressing force adjustment mechanism for adjusting pressing force of the polishing material to the polishing object area. The polishing controller is structured so as to adjust the pressing force of the polishing material through the pressing force adjustment mechanism to make a current consumption value approximately constant on the basis of the current consumption value measured by the current measurement device during polishing process.SELECTED DRAWING: Figure 5 【課題】研磨処理の間、常に研磨膜厚を一定にすることができる自動研磨システムを提供すること。【解決手段】研磨対象領域を研磨する研磨材と研磨材を駆動させる電動機とを有する研磨具と、研磨具を研磨対象領域に対して移動させる研磨ロボットと、研磨具及び研磨ロボットを制御する研磨制御器とを備えた自動研磨システムであって、電動機の消費電流値を計測する電流計測器と、研磨材の研磨対象領域に対する押付力を調整する押付力調整機構と、を備え、研磨制御器は、研磨処理の間、電流計測器によって計測される消費電流値に基づいて、消費電流値がほぼ一定となるように、押付力調整機構を介して研磨材の押付力を調整するように構成されている。【選択図】図５