MEASURING DEVICE, MEASURING METHOD, AND COMPUTER PROGRAM

• Main Author: OKUDA YOSHIYUKI
• Format: Patent
• Language: English; Japanese
• Published: 13.05.2021
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

To provide a measuring device that does not need to bring any special member into contact with a sample in order to measure the refractive index of the sample.MEANS: A measuring device 100 comprises: acquisition means 1521 that acquires first times ta1, ta2 required for a terahertz wave THz radiated to a front face 10a of a sample 10 and reflected on the front face to subsequently reach a predetermined position, and second times ta1, ta2 required for the terahertz wave radiated to the front face and reflected on a rear face of the sample to subsequently reach the predetermined position, for each of a plurality of radiation positions of the terahertz wave different from each other in position with respect to the sample; and calculation means 1522 that calculates the refractive index n of the sample on the basis of the first and second times.SELECTED DRAWING: Figure 1 【課題】試料の屈折率を計測するために試料に何らかの特殊な部材を接触させなくてもよい計測装置を提供する。【手段】計測装置１００は、試料１０の表面１０ａに照射されたテラヘルツ波ＴＨｚが表面で反射された後に所定位置に到達するまでに要する第１時間ｔａ１、ｔａ２、及び、表面に照射されたテラヘルツ波が試料の裏面で反射された後に所定位置に到達するまでに要する第２時間ｔａ１、ｔａ２を、試料に対する位置が互いに異なるテラヘルツ波の複数の照射位置の夫々毎に取得する取得手段１５２１と、第１及び第２時間に基づいて、試料の屈折率ｎを算出する算出手段１５２２とを備える。【選択図】図１