INSPECTION DEVICE

To provide an inspection device that can estimate the amount of defocus from one image or a very small number of images.SOLUTION: An inspection device includes a charged particle beam source 401 that emits a charged particle beam, a charged particle optical system including a plurality of lenses 403...

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Bibliographic Details
Main Authors TAKAHASHI NORIJI, HAYATA YASUNARI, SHINTANI ATSUKO, KOYAMA HIKARI
Format Patent
LanguageEnglish
Japanese
Published 19.11.2020
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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