PLASMA POWER SUPPLY

To provide a plasma power supply provided with a connector cover that can further suppress the generation of radiated emission while ensuring a required creepage distance.SOLUTION: A power supply 130 includes a connector cover 10 that covers a connector when a connector provided on a high-voltage ca...

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Bibliographic Details
Main Authors TSUCHIDA KOSUKE, TAKIGAWA SHINJI, IWATA TAKUYA
Format Patent
LanguageEnglish
Japanese
Published 30.07.2020
Subjects
BASIC ELECTRIC ELEMENTS
CURRENT COLLECTORS
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
LINE CONNECTORS
PLASMA TECHNIQUE
PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS
PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS
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Summary:To provide a plasma power supply provided with a connector cover that can further suppress the generation of radiated emission while ensuring a required creepage distance.SOLUTION: A power supply 130 includes a connector cover 10 that covers a connector when a connector provided on a high-voltage cable 200 connected to a plasma head is connected to the power supply 130. The connector cover 10 includes a metal cover bracket 20 that encloses the periphery of the power supply 130 when the connector and the power supply 130 are connected to each other, and a metal screw that detachably connects the cover bracket 20 and the power supply 130, and connects the cover bracket 20 and the ground provided to the power supply 130.SELECTED DRAWING: Figure 4 【課題】必要な沿面距離を確保しつつ、放射エミッションの発生をさらに抑制することが可能となるコネクタカバーを備えたプラズマ用電源装置を提供する。【解決手段】電源装置１３０は、プラズマヘッドと接続する高電圧ケーブル２００に設けられたコネクタが電源装置１３０に接続されたときに、コネクタを覆うコネクタカバー１０を備えている。コネクタカバー１０は、コネクタと電源装置１３０とが接続されたときに、電源装置１３０の周囲を囲む、金属製のカバーブラケット２０と、カバーブラケット２０と電源装置１３０とを着脱自在に接続するとともに、カバーブラケット２０と電源装置１３０に設けられたアースとを接続する金属製のネジと、を含む。【選択図】図４
Bibliography:Application Number: JP20190006761