SEMICONDUCTOR DEVICE

• Main Author: YAMAZAKI SHUNPEI
• Format: Patent
• Language: English; Japanese
• Published: 27.07.2020
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

To provide a production method of a semiconductor device which has good electric characteristics, and is hard to cause the variation in electric characteristic.SOLUTION: A semiconductor device production method comprises the steps of: forming a gate electrode 103 on a substrate 101; forming, on the...