CLEAN ROOM SYSTEM

To prevent contaminated air from flowing into a clean room without taking a special air leakage preventive measure.SOLUTION: In a clean room system, a clean room 3 is installed in a compartment 5 compartmentalized by a compartment section 4 so as to be supported with a base isolation device 2 with a...

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Bibliographic Details
Main Authors HAMABE CHISAKO, OKUYAMA HIROSHI, OKADA MITSUHIRO, HORIE WATARU, KAHARA YUMIKO, AKASHI TOKUYUKI
Format Patent
LanguageEnglish
Japanese
Published 07.05.2020
Subjects
AIR-CONDITIONING, AIR-HUMIDIFICATION, VENTILATION, USE OF AIRCURRENTS FOR SCREENING
BLASTING
BUILDING
BUILDINGS OR LIKE STRUCTURES FOR PARTICULAR PURPOSES
FENCING
FIXED CONSTRUCTIONS
HEATING
LIGHTING
MASTS
MECHANICAL ENGINEERING
RANGES
SWIMMING OR SPLASH BATHS OR POOLS
TENTS OR CANOPIES, IN GENERAL
VENTILATING
WEAPONS
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Summary:To prevent contaminated air from flowing into a clean room without taking a special air leakage preventive measure.SOLUTION: In a clean room system, a clean room 3 is installed in a compartment 5 compartmentalized by a compartment section 4 so as to be supported with a base isolation device 2 with a base isolation clearance 6 provided between an inner periphery of the compartment section 4 and an outer periphery of the clean room 3. The clean room system also has: a clean air supply section 9 which supplies purified clean air to the clean room 3 and the base isolation clearance 6; and an exhaust section 10 which exhausts air in the clean room 3 and the base isolation clearance 6 out thereof.SELECTED DRAWING: Figure 1 【課題】特殊な漏気防止対策を施すことなく、クリーンルーム内への汚染空気の流入を防止すること。【解決手段】区画部４にて区画された区画空間５には、その区画部４の内周部とクリーンルーム３の外周部との間に免震クリアランス空間６を形成させる状態で、免震装置２を介して支持されたクリーンルーム３が備えられ、清浄化した清浄空気をクリーンルーム３及び免震クリアランス空間６に供給する清浄空気供給部９と、クリーンルーム３及び免震クリアランス空間６から外部に排気する排気部１０とが備えられている。【選択図】図１
Bibliography:Application Number: JP20180204151