HOLE INSPECTION METHOD AND HOLE INSPECTION DEVICE

• Main Authors: TSUCHIYA HARUYUKI, NAGASU YOSHINORI
• Format: Patent
• Language: English; Japanese
• Published: 30.04.2020
• Subjects: MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; TESTING

To remove limitations, due to a size of a microphone, on a plane size of an inspection object component and a hole formed in the inspection object component, and also enable high-precision hole inspection.SOLUTION: A hole inspection device comprises: a speaker 110 installed in a closed type enclosure 100 having an opening 102; a speaker drive part 120 which makes a frequency sweep of the speaker 110; a standard microphone 130 which outputs an electric signal depending upon a flow rate of fluid passing through a hole when the frequency sweep of the speaker 110 is made with a component having the hole placed covering the opening; a frequency analysis part 140 which performs frequency analysis of the electric signal output from the standard microphone 130 to generate a resonance frequency spectrum; and a hole inspection part 150 which determines whether the hole is proper based upon the resonance frequency spectrum. It is determined whether the hole is proper based upon the reference resonance frequency generated corresponding to a master sample and an inspection object resonance spectrum generated corresponding to the inspection object component.SELECTED DRAWING: Figure 1 【課題】検査対象部品の平面サイズ及び当該検査対象部品に形成されている孔がマイクロホンのサイズによって制限されることなく、かつ、高精度な孔検査を可能とする。【解決手段】開口１０２を有する密閉型の筐体１００内に設置されたスピーカー１１０と、スピーカー１１０を周波数掃引するスピーカー駆動部１２０と、孔を有する部品が開口を覆うように載置された状態でスピーカー１１０を周波数掃引したときに、孔を通過する流体の流量に依存した電気信号を出力する標準マイクロホン１３０と、標準マイクロホン１３０から出力される電気信号を周波数分析して共鳴周波数スペクトルを生成する周波数分析部１４０と、共鳴周波数スペクトルに基づいて、孔の適否を判定する孔検査部１５０とを備え、マスターサンプに対応して生成された基準共鳴周波数スペクトルと、検査対象部品に対応して生成された検査対象共鳴周波数スペクトルとに基づいて、孔の適否を判定する。【選択図】図１