THREE-DIMENSIONAL SHAPE MEASURING SYSTEM, THREE-DIMENSIONAL SHAPE MEASURING METHOD, AND THREE-DIMENSIONAL SHAPE MEASURING PROGRAM

To provide a three-dimensional shape measuring system, a three-dimensional shape measuring method and a three-dimensional shape measuring program with which it is possible to measure a three-dimensional shape applying a TDC method, even when there is interreflection light on an object having strong...

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Bibliographic Details
Main Author SUMIYOSHI SHINICHI
Format Patent
LanguageEnglish
Japanese
Published 06.02.2020
Subjects
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