SEMICONDUCTOR SUBSTRATE WITH PASSIVATION LAYER, SOLAR BATTERY ELEMENT AND SOLAR BATTERY
To provide a semiconductor substrate with passivation layer excellent in a passivation effect, and a solar battery element with passivation layer excellent in passivation effect and excellent in power generation performance and a solar battery.SOLUTION: The semiconductor substrate with passivation l...
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Language | English Japanese |
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10.10.2019
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Abstract | To provide a semiconductor substrate with passivation layer excellent in a passivation effect, and a solar battery element with passivation layer excellent in passivation effect and excellent in power generation performance and a solar battery.SOLUTION: The semiconductor substrate with passivation layer includes: a semiconductor substrate 1; a passivation layer 5 which is provided at least a part of at least one surface of the semiconductor substrate 1 and contains Bi; and a silicon nitride film formed on the passivation layer 5. An average thickness of all of the passivation layer 5 and the silicon nitride film is 10 nm to 1000 nm.SELECTED DRAWING: Figure 1
【課題】パッシベーション効果に優れるパッシベーション層を有するパッシベーション層付半導体基板、並びにパッシベーション効果に優れるパッシベーション層を有し、且つ、発電性能に優れる太陽電池素子及び太陽電池を提供する。【解決手段】パッシベーション層付半導体基板は、半導体基板1と、半導体基板1の少なくとも一方の面の少なくとも一部に設けられ、Biを含有するパッシベーション層5と、パッシベーション層5上に設けられる窒化ケイ素膜と、を有し、パッシベーション層5及び前記窒化ケイ素膜の合計の平均厚みが10nm〜1000nmである。【選択図】図1 |
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AbstractList | To provide a semiconductor substrate with passivation layer excellent in a passivation effect, and a solar battery element with passivation layer excellent in passivation effect and excellent in power generation performance and a solar battery.SOLUTION: The semiconductor substrate with passivation layer includes: a semiconductor substrate 1; a passivation layer 5 which is provided at least a part of at least one surface of the semiconductor substrate 1 and contains Bi; and a silicon nitride film formed on the passivation layer 5. An average thickness of all of the passivation layer 5 and the silicon nitride film is 10 nm to 1000 nm.SELECTED DRAWING: Figure 1
【課題】パッシベーション効果に優れるパッシベーション層を有するパッシベーション層付半導体基板、並びにパッシベーション効果に優れるパッシベーション層を有し、且つ、発電性能に優れる太陽電池素子及び太陽電池を提供する。【解決手段】パッシベーション層付半導体基板は、半導体基板1と、半導体基板1の少なくとも一方の面の少なくとも一部に設けられ、Biを含有するパッシベーション層5と、パッシベーション層5上に設けられる窒化ケイ素膜と、を有し、パッシベーション層5及び前記窒化ケイ素膜の合計の平均厚みが10nm〜1000nmである。【選択図】図1 |
Author | HAYASAKA TAKESHI SHIMIZU MARI KIZAWA KEIKO NOJIRI TAKESHI |
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DocumentTitleAlternate | パッシベーション層付半導体基板、太陽電池素子、及び太陽電池 |
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RelatedCompanies | HITACHI CHEMICAL CO LTD |
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Snippet | To provide a semiconductor substrate with passivation layer excellent in a passivation effect, and a solar battery element with passivation layer excellent in... |
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SubjectTerms | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
Title | SEMICONDUCTOR SUBSTRATE WITH PASSIVATION LAYER, SOLAR BATTERY ELEMENT AND SOLAR BATTERY |
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