COMPOSITE SUBSTRATE AND METHOD FOR MANUFACTURING THE SAME

To provide a composite substrate that can ensure strong bonding and a method for manufacturing the same.SOLUTION: A composite substrate 20 is formed by bonding through an amorphous layer 23 a first substrate 21 formed of a single crystal of lithium tantalate or lithium niobate and a second substrate...

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Main Authors IDE KENSUKE, UCHIUMI ATSUSHI, GOTO TAKAYUKI, SUZUKI TAKENORI
Format Patent
LanguageEnglish
Japanese
Published 03.10.2019
Subjects
BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
RESONATORS
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Abstract To provide a composite substrate that can ensure strong bonding and a method for manufacturing the same.SOLUTION: A composite substrate 20 is formed by bonding through an amorphous layer 23 a first substrate 21 formed of a single crystal of lithium tantalate or lithium niobate and a second substrate 22 formed of a single crystal of silicon. The amorphous layer 23 contains two or more of Ar, Ne, Kr and Xe.SELECTED DRAWING: Figure 1 【課題】強固な接合を確保できる複合基板及び複合基板の製造方法を提供する。【解決手段】複合基板２０は、タンタル酸リチウム又はニオブ酸リチウムの単結晶で形成された第１基板２１と、シリコンの単結晶で形成された第２基板２２とが、アモルファス層２３を介して接合された複合基板であって、アモルファス層２３は、Ａｒ、Ｎｅ、Ｋｒ及びＸｅのうち２種類以上を含有する。【選択図】図１
AbstractList To provide a composite substrate that can ensure strong bonding and a method for manufacturing the same.SOLUTION: A composite substrate 20 is formed by bonding through an amorphous layer 23 a first substrate 21 formed of a single crystal of lithium tantalate or lithium niobate and a second substrate 22 formed of a single crystal of silicon. The amorphous layer 23 contains two or more of Ar, Ne, Kr and Xe.SELECTED DRAWING: Figure 1 【課題】強固な接合を確保できる複合基板及び複合基板の製造方法を提供する。【解決手段】複合基板２０は、タンタル酸リチウム又はニオブ酸リチウムの単結晶で形成された第１基板２１と、シリコンの単結晶で形成された第２基板２２とが、アモルファス層２３を介して接合された複合基板であって、アモルファス層２３は、Ａｒ、Ｎｅ、Ｋｒ及びＸｅのうち２種類以上を含有する。【選択図】図１
Author SUZUKI TAKENORI
GOTO TAKAYUKI
UCHIUMI ATSUSHI
IDE KENSUKE
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Snippet To provide a composite substrate that can ensure strong bonding and a method for manufacturing the same.SOLUTION: A composite substrate 20 is formed by bonding...
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SubjectTerms BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
RESONATORS
Title COMPOSITE SUBSTRATE AND METHOD FOR MANUFACTURING THE SAME
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