SEMICONDUCTOR STORAGE DEVICE AND METHOD OF MANUFACTURING THE SAME

• Main Authors: HAGISHIMA DAISUKE, HARADA KAZUNORI, KONNO TAKUYA
• Format: Patent
• Language: English; Japanese
• Published: 03.10.2019
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

To provide a semiconductor storage device having improved electric characteristics, and to provide a method of manufacturing the same.SOLUTION: A semiconductor storage device comprises a substrate, a laminate, and a columnar part. The columnar part has a semiconductor part provided in the laminate a...