LASER PROCESSING DEVICE AND LASER PROCESSING METHOD

• Main Authors: KUWABARA KENICHI, MATSUBARA YOICHI, WADA SUSUMU
• Format: Patent
• Language: English; Japanese
• Published: 19.09.2019
• Subjects: CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; FREQUENCY-CHANGING; MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICAL LOGIC ELEMENTS; OPTICS; PERFORMING OPERATIONS; PHYSICS; SOLDERING OR UNSOLDERING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; TRANSPORTING; WELDING; WORKING BY LASER BEAM

To improve boring work efficiency and enhance roundness of a bored hole.SOLUTION: A laser processing device, which performs fine boring by irradiating a laser beam to a work-piece, is provided with: two AODs, arranged on an optical path of a laser beam emitted from a laser light source, in series and in close proximity to each other, on which laser beams are sequentially made incident and which deflect and emit the laser beams at angles corresponding to frequencies of inputted ultrasonic waves, at high speed and in planes orthogonal to each other; an aperture grill that arranges cross sectional shapes of the laser beams emitted from the AODs; two galvano mirrors, arranged in series to each other and combined so that the mirrors turn around shaft lines orthogonal to each other, which sequentially deflect laser beams emitted from the aperture grill; an fθ lens that makes the laser beams emitted from the galvano mirrors vertically incident to the work-piece and converges the beams at a position of the work-piece.SELECTED DRAWING: Figure 1 【課題】穴空け加工効率を高めるとともに加工穴の真円度を高める。【解決手段】加工対象物にレーザビームを照射して微細な穴空け加工を行うレーザ加工装置が、レーザ光源から出射されるレーザビームの光路上に互いに直列にかつ互いに近接して配置されてそのレーザビームを順次に入射され、各々入力された超音波の周波数に応じた角度に高速でかつ互いに直角な平面内でそのレーザビームを偏向させて出射させる二個のＡＯＤと、ＡＯＤから出射されるレーザビームの断面形状を整えるアパーチャグリルと、互いに直列に配置されるとともに互いに直角な軸線周りに回動するように組み合わされて、アパーチャグリルから出射されるレーザビームを順次に偏向させる二つのガルバノミラーと、ガルバノミラーから出射されるレーザビームを加工対象物に垂直に入射させ、その加工対象物の位置で収束させるｆθレンズとを具えている。【選択図】図１