PROCESSING HEAD AND PROCESSOR AND PROCESSING METHOD OF ANALYSIS CHIP

To provide a processing head, a processor and a processing method capable of achieving efficient washing with high quality and removing contamination in each array part individually, without contaminating other array parts arranged on the surrounding of the array part to be washed, due to leakage of...

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Bibliographic Details
Main Authors KITAMURA YOSHIYUKI, KURODA TOSHIHIKO
Format Patent
LanguageEnglish
Japanese
Published 19.09.2019
Subjects
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