PLASMA ACTUATOR AND SURFACE PURIFICATION DEVICE
To provide a plasma actuator capable of effectively utilizing an OH radical and also to provide a surface purification device using the same.SOLUTION: A surface purification device 20 includes: an electrode member 11 having a first surface opposite to a processing object 40 and a second surface on t...
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Language | English Japanese |
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29.08.2019
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Abstract | To provide a plasma actuator capable of effectively utilizing an OH radical and also to provide a surface purification device using the same.SOLUTION: A surface purification device 20 includes: an electrode member 11 having a first surface opposite to a processing object 40 and a second surface on the side opposite to the first surface; an application electrode 12 provided on the first surface; a ground electrode 13 provided on the second surface or in the inside of the electrode member 11; a support member 14 forming a processing space 24 between the processing object 40 and the electrode member 11, equipped with at least one of the electrode member 11 or the application electrode 12 and capable of abutting with the processing object; and a power source 30 for applying an AC voltage to the application electrode 12 and the ground electrode 13, and then, plasma is generated in a processing space 24.SELECTED DRAWING: Figure 1A
【課題】OHラジカルを有効利用できるプラズマアクチュエータと、それを用いた表面浄化装置を提供する。【解決手段】表面浄化装置20は、処理対象物40と対向する第1の面および前記第1の面の反対側の第2の面を持つ電極部材11と、前記第1の面に設けられる印加電極12と、前記第2の面又は前記電極部材11の内部に設けられる接地電極13と、前記処理対象物40と前記電極部材11の間に処理空間24を形成し、前記電極部材11又は前記印加電極12の少なくとも一方に備えられ、前記処理対象物に当接可能な支持部材14と、印加電極12及び前記接地電極13に交流電圧を印加する電源30とを備え、前記処理空間24にプラズマを生成する。【選択図】図1A |
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AbstractList | To provide a plasma actuator capable of effectively utilizing an OH radical and also to provide a surface purification device using the same.SOLUTION: A surface purification device 20 includes: an electrode member 11 having a first surface opposite to a processing object 40 and a second surface on the side opposite to the first surface; an application electrode 12 provided on the first surface; a ground electrode 13 provided on the second surface or in the inside of the electrode member 11; a support member 14 forming a processing space 24 between the processing object 40 and the electrode member 11, equipped with at least one of the electrode member 11 or the application electrode 12 and capable of abutting with the processing object; and a power source 30 for applying an AC voltage to the application electrode 12 and the ground electrode 13, and then, plasma is generated in a processing space 24.SELECTED DRAWING: Figure 1A
【課題】OHラジカルを有効利用できるプラズマアクチュエータと、それを用いた表面浄化装置を提供する。【解決手段】表面浄化装置20は、処理対象物40と対向する第1の面および前記第1の面の反対側の第2の面を持つ電極部材11と、前記第1の面に設けられる印加電極12と、前記第2の面又は前記電極部材11の内部に設けられる接地電極13と、前記処理対象物40と前記電極部材11の間に処理空間24を形成し、前記電極部材11又は前記印加電極12の少なくとも一方に備えられ、前記処理対象物に当接可能な支持部材14と、印加電極12及び前記接地電極13に交流電圧を印加する電源30とを備え、前記処理空間24にプラズマを生成する。【選択図】図1A |
Author | AKITA MASATO TAKAMATSU TOMONAO UI AKIO |
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DocumentTitleAlternate | プラズマアクチュエータ及び表面浄化装置 |
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Snippet | To provide a plasma actuator capable of effectively utilizing an OH radical and also to provide a surface purification device using the same.SOLUTION: A... |
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SubjectTerms | CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS THEIR RELEVANT APPARATUS TRANSPORTING |
Title | PLASMA ACTUATOR AND SURFACE PURIFICATION DEVICE |
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