PLASMA ACTUATOR AND SURFACE PURIFICATION DEVICE

• Main Authors: TAKAMATSU TOMONAO, UI AKIO, AKITA MASATO
• Format: Patent
• Language: English; Japanese
• Published: 29.08.2019
• Subjects: CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; PERFORMING OPERATIONS; PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL; PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS; THEIR RELEVANT APPARATUS; TRANSPORTING

To provide a plasma actuator capable of effectively utilizing an OH radical and also to provide a surface purification device using the same.SOLUTION: A surface purification device 20 includes: an electrode member 11 having a first surface opposite to a processing object 40 and a second surface on the side opposite to the first surface; an application electrode 12 provided on the first surface; a ground electrode 13 provided on the second surface or in the inside of the electrode member 11; a support member 14 forming a processing space 24 between the processing object 40 and the electrode member 11, equipped with at least one of the electrode member 11 or the application electrode 12 and capable of abutting with the processing object; and a power source 30 for applying an AC voltage to the application electrode 12 and the ground electrode 13, and then, plasma is generated in a processing space 24.SELECTED DRAWING: Figure 1A 【課題】ＯＨラジカルを有効利用できるプラズマアクチュエータと、それを用いた表面浄化装置を提供する。【解決手段】表面浄化装置２０は、処理対象物４０と対向する第１の面および前記第１の面の反対側の第２の面を持つ電極部材１１と、前記第１の面に設けられる印加電極１２と、前記第２の面又は前記電極部材１１の内部に設けられる接地電極１３と、前記処理対象物４０と前記電極部材１１の間に処理空間２４を形成し、前記電極部材１１又は前記印加電極１２の少なくとも一方に備えられ、前記処理対象物に当接可能な支持部材１４と、印加電極１２及び前記接地電極１３に交流電圧を印加する電源３０とを備え、前記処理空間２４にプラズマを生成する。【選択図】図１Ａ