INSPECTION DEVICE AND INSPECTION METHOD

• Main Authors: HAYASHI KENTA, YOSHIOKA HIDENORI, OKAWA KOJIRO
• Format: Patent
• Language: English; Japanese
• Published: 04.07.2019
• Subjects: MEASURING; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PHYSICS; TESTING; TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES; TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR

To provide an inspection device and an inspection method capable of inspecting with high accuracy a diffraction optical element sheet including a plurality of unit diffractive optical elements arrayed on a sheet surface.SOLUTION: An inspection device 1 comprises: a holding part 10 holding a diffraction optical element sheet 500 and provided movably; a drive part 20 moving the holding part 10 in a direction along a sheet surface of the diffraction optical element sheet 500; a light projecting part 30 projecting inspection light to the diffraction optical element sheet 500 held by the holding part 10; an imaging part 40 imaging the inspection light transmitting through the diffraction optical element sheet 500; and an imaging control part 80 controlling the imaging part 40 and the drive part 20 so as to cause the imaging part 40 to perform imaging at least with the inspection light being projected to a chip 501 and sequentially imaging the inspection light.SELECTED DRAWING: Figure 1 【課題】シート面内に複数の単位回折光学要素が配列されている回折光学素子シートを簡単、かつ、高い精度で検査できる検査装置、検査方法を提供する。【解決手段】検査装置１は、回折光学素子シート５００を保持し、かつ、移動可能に設けられた保持部１０と、保持部１０を回折光学素子シート５００のシート面に沿った方向に移動させる駆動部２０と、保持部１０に保持された回折光学素子シート５００に検査光を投光する投光部３０と、回折光学素子シート５００を透過した検査光を撮影する撮影部４０と、少なくともチップ５０１に対して検査光が投光された状態で撮影部４０が撮影を行うように撮影部４０と駆動部２０とを制御し、検査光の撮影を逐次行う撮影制御部８０とを備える。【選択図】図１