TRANSFER CONTAINER AUTO CLAMP MECHANISM

• Main Authors: HARA SHIRO, SAGISAWA KOJI, MAEKAWA HITOSHI, NISHIHARA HIROYUKI
• Format: Patent
• Language: English; Japanese
• Published: 24.06.2019
• Subjects: BASIC ELECTRIC ELEMENTS; CONVEYING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; HANDLING THIN OR FILAMENTARY MATERIAL; PACKING; PERFORMING OPERATIONS; PNEUMATIC TUBE CONVEYORS; SEMICONDUCTOR DEVICES; SHOP CONVEYOR SYSTEMS; STORING; TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING; TRANSPORTING

To provide an inexpensive auto clamp mechanism capable of automatically fixing/releasing a wafer transfer container to/from a manufacturing installation, and having a small height dimension.SOLUTION: A wafer transfer container 200 is mounted on a container mounting table 130. While being mounted on the container bottom 201 of the wafer transfer container 200, a semiconductor wafer 300 is carried into the manufacturing apparatus body from a wafer carry-in port 131. An auto clamp mechanism 140 abuts the claws 702 of multiple clamp claws 141 against a gradient abutment surface 202a provided on the container lid part 202 of the wafer transfer container 200 and presses substantially in the horizontal direction, and makes the wafer transfer container 200 generate a pressed force component in the vertical direction, and fixes to the container mounting table 130.SELECTED DRAWING: Figure 6 【課題】ウェハ搬送容器を製造装置に自動的に固定・解除することができ、高さ寸法が小さいオートクランプ機構を安価に提供する。【解決手段】容器載置台１３０には、ウェハ搬送容器２００が載置される。このウェハ搬送容器２００の容器底部２０１に載置したままの状態で、半導体ウェハ３００が、ウェハ搬入口１３１から製造装置本体へ搬入される。オートクランプ機構１４０は、複数のクランプ爪１４１の爪部７０２を、ウェハ搬送容器２００の容器蓋部２０２に設けた傾斜当接面２０２ａに当接して略水平方向へ押圧することで、このウェハ搬送容器２００に垂直方向の被押圧力成分を発生させて、容器載置台１３０に固定する。【選択図】図６