SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
To increase exhaust heat efficiency and heat resistance, and to achieve the miniaturization of a device in a silicon photonics device which supplies power to an optical waveguide by using a heater.SOLUTION: There is provided a modulator including: an optical waveguide CR1 formed on an insulation fil...
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Main Authors | , , |
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Format | Patent |
Language | English Japanese |
Published |
24.01.2019
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Subjects | |
Online Access | Get full text |
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