INSPECTION METHOD OF OPTICAL DEFLECTOR, OPTICAL DEFLECTOR AND IMAGE PROJECTION DEVICE

• Main Author: AKANUMA GOICHI
• Format: Patent
• Language: English; Japanese
• Published: 04.10.2018
• Subjects: ARRANGEMENT OR MOUNTING OF PLURAL DIVERSE PRIME-MOVERS INVEHICLES; ARRANGEMENT OR MOUNTING OF PROPULSION UNITS OR OFTRANSMISSIONS IN VEHICLES; ARRANGEMENTS IN CONNECTION WITH COOLING, AIR INTAKE, GASEXHAUST OR FUEL SUPPLY OF PROPULSION UNITS, IN VEHICLES; AUXILIARY DRIVES FOR VEHICLES; CORRECTION OF TYPOGRAPHICAL ERRORS; i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; INSTRUMENTATION OR DASHBOARDS FOR VEHICLES; LINING MACHINES; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES; MICROSTRUCTURAL TECHNOLOGY; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PERFORMING OPERATIONS; PHYSICS; PRINTING; PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS; SELECTIVE PRINTING MECHANISMS; STAMPS; TRANSPORTING; TYPEWRITERS; VEHICLES IN GENERAL

PROBLEM TO BE SOLVED: To provide an optical deflector that can be more efficiently manufactured.SOLUTION: An inspection method of an optical deflector is provided for inspecting an optical deflector. The optical deflector includes a substrate having a first silicon layer and a second silicon layer, a drive part disposed on the substrate and performing resonance driving, and a pattern part for measuring the thickness of the second silicon pattern. The method includes a measurement step of measuring the thickness of the second silicon layer by the pattern part and a determination step of determining whether abnormality in a resonant frequency of the resonance driving is present or not based on the thickness measured in the measurement step.SELECTED DRAWING: Figure 15 【課題】光偏向器をより効率的に製造可能とする。【解決手段】光偏向器を検査する光偏向器検査方法であって、光偏向器は、第１のシリコン層と、第２のシリコン層と、を有する基板と、基板上に設けられ、共振駆動を行う駆動部と、第２のシリコン層の厚さを測定するためのパターン部と、を備え、パターン部により第２のシリコン層の厚さを測定する測定工程と、測定工程で測定した厚さに基づき、共振駆動の共振周波数に異常があるか否かを判断する判断工程と、を含む。【選択図】図１５