DUAL-CHANNEL SHOWERHEAD WITH IMPROVED PROFILE
PROBLEM TO BE SOLVED: To provide an improved system and an improved method which can be used for forming high-quality devices and structures.SOLUTION: A processing chamber 500 includes: a first showerhead 515 positioned between a lid 502 and a processing region; and a faceplate 509 positioned betwee...
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Main Author | |
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Format | Patent |
Language | English Japanese |
Published |
24.05.2018
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Subjects | |
Online Access | Get full text |
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