DUAL-CHANNEL SHOWERHEAD WITH IMPROVED PROFILE

• Main Author: DMITRY LUBOMIRSKY
• Format: Patent
• Language: English; Japanese
• Published: 24.05.2018
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS; SEMICONDUCTOR DEVICES; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

PROBLEM TO BE SOLVED: To provide an improved system and an improved method which can be used for forming high-quality devices and structures.SOLUTION: A processing chamber 500 includes: a first showerhead 515 positioned between a lid 502 and a processing region; and a faceplate 509 positioned between the first showerhead and the processing region 560. The chamber also includes a second showerhead 535 positioned in the chamber between the faceplate and the processing region of the semiconductor processing chamber. The second showerhead includes at least two plates coupled together to define a volume 537 between the at least two plates. The at least two plates at least partially define channels 540, 545 running through the second showerhead.SELECTED DRAWING: Figure 5 【課題】高品質のデバイス及び構造を形成するために使用することができる改良されたシステム及び方法を提供する。【解決手段】処理チャンバ５００は、リッド５０２と処理領域との間に位置付けられた第１のシャワーヘッド５１５を含み、第１のシャワーヘッドと処理領域５６０との間に位置付けられた面板５０９を含む。チャンバはまた、面板と半導体処理チャンバの処理領域との間のチャンバ内に位置付けられた第２のシャワーヘッド５３５を含む。第２のシャワーヘッドは、少なくとも２つの板の間に空間５３７を画定するように連結された少なくとも２つの板を含む。少なくとも２つの板は、第２のシャワーヘッドを通るチャネル５４０、５４５を少なくとも部分的に画定する。【選択図】図５