LIQUID IMMERSION EXPOSURE DEVICE

PROBLEM TO BE SOLVED: To provide an environmental system controlling the environment of a gap between an optical assembly and a device including a fluid barrier, a liquid immersion fluid system and a transfer region, in which the transfer region catches a liquid immersion fluid going out from the ga...

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Bibliographic Details
Main Authors WATSON DOUGLAS C, NOVAK THOMAS W, HAZELTON ANDREW J
Format Patent
LanguageEnglish
Japanese
Published 15.03.2018
Subjects
ACCESSORIES THEREFOR
APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USINGWAVES OTHER THAN OPTICAL WAVES
APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FORPROJECTING OR VIEWING THEM
APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
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Summary:PROBLEM TO BE SOLVED: To provide an environmental system controlling the environment of a gap between an optical assembly and a device including a fluid barrier, a liquid immersion fluid system and a transfer region, in which the transfer region catches a liquid immersion fluid going out from the gap and preventing the leakage of the fluid, and further, the use of direct pressure reduction suction having a risk of deforming the device and/or the optical assembly to the device can be evaded.SOLUTION: A fluid barrier 254 is positioned in the vicinity of a device and retains a transfer region in the vicinity of a gap. A liquid immersion fluid system 252 feeds a liquid immersion fluid 248 filling the gap 246. The transfer region transfers at least a part of the liquid immersion fluid 248 in the vicinity of the fluid barrier 254 and the device so as to be separated from the device. The liquid immersion fluid system 252 may include a fluid removal system 282 communicated with the transfer region 256. The transfer region 256 can be made with a porous material.SELECTED DRAWING: Figure 2B 【課題】光アセンブリとデバイスの間のギャップの環境を制御する環境システムは、流体バリア、液浸流体システム、及び移送領域を含む。移送領域は、ギャップから出る液浸流体を捕え流体の漏出を防ぐとともに、デバイス及び／又は光学アセンブリを変形させる可能性のある直接的な減圧吸引をデバイスに使用することを回避する環境システムを提供する。【解決手段】流体バリア２５４は、デバイスの近くに位置付けられ、移送領域をギャップの近くに維持する。液浸流体システム２５２は、ギャップ２４６を充たす液浸流体２４８を供給する。移送領域は、流体バリア２５４、及びデバイスの近くにある液浸流体２４８の少なくとも一部をデバイスから離れるように移送する。液浸流体システム２５２は、移送領域２５６と流通している流体除去システム２８２を含むことができる。移送領域２５６は多孔性材料で製作できる。【選択図】図２Ｂ
Bibliography:Application Number: JP20170238410