ION SOURCE, QUADRUPOLE MASS SPECTROMETER AND RESIDUAL GAS ANALYZING METHOD

PROBLEM TO BE SOLVED: To provide an ion source capable of efficiently extracting ions.SOLUTION: An ion source 21 according to the present invention includes: a conductive tubular body 212 having an ion emitting aperture 212P in a tip surface thereof and a penetration portion in a side face thereof a...

Full description

Saved in:
Bibliographic Details
Main Authors NAKAZONO MASANOBU, NAKAI JUNYA, YABUSHITA HIROTAKA, KATSUTA TOMOKO
Format Patent
LanguageEnglish
Japanese
Published 22.06.2017
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
Online AccessGet full text

Cover

More Information
Summary:PROBLEM TO BE SOLVED: To provide an ion source capable of efficiently extracting ions.SOLUTION: An ion source 21 according to the present invention includes: a conductive tubular body 212 having an ion emitting aperture 212P in a tip surface thereof and a penetration portion in a side face thereof allowing thermo-electrons to pass through from the outside toward the inside; a mesh 213 arranged at the outside of the penetration portion; and a thermo-electron emission filament 214 arranged at the outside of the mesh 213. The ion source is configured such that the thermo-electrons emitted from the thermo-electron emission filament 214 penetrate the mesh 213 and reach the inside of the conductive tubular body 212 through the penetration portion.SELECTED DRAWING: Figure 4 【課題】イオンを効率よく引き出すことができるイオン源を提供することを主な目的とする。【解決手段】本発明に係るイオン源２１は、先端面にイオン射出口２１２Ｐを有し、側面には外側から内側に向かって熱電子を通過させることができる貫通部を有する導電性筒状体２１２と、前記貫通部の外側に配置されたメッシュ２１３と、前記メッシュ２１３の外側に配置された熱電子放出用フィラメント２１４とを具備し、前記熱電子放出用フィラメント２１４から放出された熱電子が前記メッシュ２１３を貫通し、前記貫通部を通って前記導電性筒状体２１２の内部に到達するように構成されたことを特徴とする。【選択図】図４
Bibliography:Application Number: JP20160238434