FRONT OPENING RING POD

• Main Authors: SCOTT WONG, AUSTIN NGO, DAMON TYRONE GENETTI, ALEX PATERSON, DEREK JOHN WITKOWICKI, MARC ESTOQUE, RICHARD H GOULD
• Format: Patent
• Language: English; Japanese
• Published: 01.06.2017
• Subjects: ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; BASIC ELECTRIC ELEMENTS; CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS,e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES,DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; CONVEYING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; HANDLING THIN OR FILAMENTARY MATERIAL; PACKAGES; PACKAGING ELEMENTS; PACKING; PERFORMING OPERATIONS; SEMICONDUCTOR DEVICES; STORING; TRANSPORTING

PROBLEM TO BE SOLVED: To provide a pod for replacing expendable parts in a process module used for manufacturing a semiconductor wafer.SOLUTION: A pod 1000 for replacing an expendable component 208 in a process module includes a base plate 1134 having a front side, a back side, and first and second side sides. First, second, third and fourth struts 1129 include vertically oriented inwardly directed fingers 1130. A first emergency stop post 1128 is disposed parallel to the third post and a second emergency stop post 1128 is disposed parallel to the fourth post. The shell structure connected to the base plate is configured to surround first, second, third and fourth struts, top plate 1132, first and second emergency stop columns, and has a front opening located on the front side of the base plate. The door includes a retaining assembly for mating with the front opening and securing the consumable part 208 in the pod when the consumable part 208 is housed in the pod.SELECTED DRAWING: Figure 16 【課題】半導体ウエハ製造に使われるプロセスモジュール内の消耗部品を交換するためのポッドを提供する。【解決手段】プロセスモジュール内の消耗部品２０８を交換するためのポッド１０００は、正面側と、背面側と、第１及び第２の側面側とを有するベース板１１３４を含む。第１、第２、第３、第４の支柱１１２９は、縦方向に配されて内側に向けられたフィンガ１１３０を含む。第１の緊急停止柱１１２８が、第３の支柱に平行に配置され、第２の緊急停止柱１１２８が、第４の支柱に平行に配置される。ベース板に接続されたシェル構造が、第１、第２、第３及び第４の支柱、トップ板１１３２、第１及び第２の緊急停止柱を取り囲むように構成され、ベース板の正面側に配置された正面開口を有する。ドアが、正面開口と嵌め合わされ、ポッド内に収容されたときの消耗部品２０８をポッド内で固定するための保持アセンブリを含む。【選択図】図１６