SEMICONDUCTOR DEVICE
PROBLEM TO BE SOLVED: To provide a semiconductor device which inhibits deterioration in reliability caused by film peeling of an electrode.SOLUTION: A semiconductor device comprises: a silicon carbide layer 10 having a first surface 14 and a second surface 12 provided on the opposite side of the fir...
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Main Authors | , |
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Format | Patent |
Language | English Japanese |
Published |
23.03.2017
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Subjects | |
Online Access | Get full text |
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