TEST DEVICE AND ELECTRON MICROSCOPE INCLUDING THE SAME

• Main Author: TANIYAMA AKIRA
• Format: Patent
• Language: English; Japanese
• Published: 04.11.2016
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

PROBLEM TO BE SOLVED: To provide a test device capable of securely heating a deformed portion of a sample at a set temperature to observe and analyze and an electron microscope including the same.SOLUTION: A test device 10 comprises: a sample room 1 having a widow 11 through which a laser beam A can transmit; a heating mechanism 2 for heating a sample 200 by irradiating a surface 200a of the sample 200 disposed inside the sample room 1 with the laser beam A through the window 11 from outside of the sample room 1; and a processing mechanism 3 disposed inside the sample room 1, for processing the sample 200. The heating mechanism 2 includes: a laser oscillator 21 for oscillating the laser beam A; and a condensing and scanning part 22 for condensing the laser beam A, capable of scanning on a surface of the sample 200.SELECTED DRAWING: Figure 2 【課題】試料の変形箇所を確実に設定温度に加熱し、観察・分析できる試験装置およびそれを備えた電子顕微鏡を提供する。【解決手段】レーザー光Ａが通過可能な窓１１を有する試料室１と、試料室１の外部から窓１１を通して、レーザー光Ａを試料室１の内部に配置された試料２００の表面２００ａに照射して試料２００を加熱する加熱機構２と、試料室１の内部に配置され、試料２００に加工を施す加工機構３と、を備え、加熱機構２は、レーザー光Ａを発振するレーザー発振器２１、およびレーザー光Ａを集光するとともに、試料２００の表面上において走査可能な集光走査部２２を有する、試験装置１０。【選択図】 図２