MANUFACTURING METHOD FOR GLASS SUBSTRATE, AND MANUFACTURING APPARATUS FOR GLASS SUBSTRATE

• Main Author: ISE HIRONORI
• Format: Patent
• Language: English; Japanese
• Published: 20.10.2016
• Subjects: CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUSENAMELS; CHEMISTRY; GLASS; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; JOINING GLASS TO GLASS OR OTHER MATERIALS; MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES; MEASURING; METALLURGY; MINERAL OR SLAG WOOL; PHYSICS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS,MINERALS OR SLAGS; SURFACE TREATMENT OF GLASS; TESTING

PROBLEM TO BE SOLVED: To provide a manufacturing method for a glass substrate and a manufacturing apparatus for a glass substrate, which can sense the defect of the glass substrate with high accuracy.SOLUTION: A manufacturing method for a glass substrate includes a transportation process, a restriction process, and an inspection process. In the transportation process, the glass substrate is transported in a state that the glass substrate is suspended in a first direction parallel to a main surface of the glass substrate. In the restriction process, the movement of the glass substrate is restricted in a second direction orthogonal to the main surface using a plurality of restriction means while the glass substrate is transported. In the inspection process, the main surface is optically inspected for the defect by using a plurality of inspection means while the glass substrate is transported. The restriction means ejects gas toward at least one main surface of the glass substrate to restrict the movement of the glass substrate in the second direction. At least one inspection means is disposed before the restriction means in the first direction. At least one inspection means is disposed after the restriction means in the first direction.SELECTED DRAWING: Figure 2 【課題】本発明の目的は、ガラス基板の欠陥を高い精度で検知することができるガラス基板の製造方法およびガラス基板の製造装置を提供することである。【解決手段】ガラス基板の製造方法は、搬送工程と抑制工程と検査工程とを備える。搬送工程は、ガラス基板の主表面に平行な第１方向にガラス基板を吊り下げられた状態で搬送する。抑制工程は、ガラス基板が搬送されている間に、複数の抑制手段を用いて、主表面と直交する第２方向におけるガラス基板の動きを抑制する。検査工程は、ガラス基板が搬送されている間に、複数の検査手段を用いて、主表面の欠陥を光学的に検査する。抑制手段は、ガラス基板の少なくとも一方の主表面に向かって気体を噴出することで、第２方向におけるガラス基板の動きを抑制する。少なくとも１つの検査手段は、第１方向において抑制手段の前に配置される。少なくとも１つの検査手段は、第１方向において抑制手段の後に配置される。【選択図】図２