ELECTROSTATIC SUCTION METHOD AND SUBSTRATE PROCESSING APPARATUS
PROBLEM TO BE SOLVED: To suppress increase in a leakage quantity of a heat medium to be supplied into a space that is held between a focus ring and an electrostatic chuck.SOLUTION: The electrostatic suction method uses a substrate processing apparatus comprising: a supply part for supplying the heat...
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Main Authors | , , , |
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Format | Patent |
Language | English Japanese |
Published |
07.07.2016
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Subjects | |
Online Access | Get full text |
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