INTEGRATED CAPACITANCE SENSING MODULE AND ASSOCIATED SYSTEM

• Main Authors: LEE WEN-HAO, LIU HSINOU, YANG CHING-SUNG, CHEN WEI-REN
• Format: Patent
• Language: English; Japanese
• Published: 07.07.2016
• Subjects: BASIC ELECTRIC ELEMENTS; CALCULATING; COMPUTING; COUNTING; ELECTRIC DIGITAL DATA PROCESSING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; PHYSICS; SEMICONDUCTOR DEVICES

PROBLEM TO BE SOLVED: To provide an integrated capacitance sensing module and an associated system.SOLUTION: An integrated capacitance sensing module includes a silicon substrate 510, first, second and third intermediate dielectric layers 520, 532, 533, a plurality of conducting layers 521-52m, a sh...