PRESSURE SENSOR AND METHOD FOR MANUFACTURING THE SAME

• Main Authors: MURATA MINORU, YOKURA HISANORI, TSUNODA KAZUYUKI
• Format: Patent
• Language: English; Japanese
• Published: 30.06.2016
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; SEMICONDUCTOR DEVICES; TESTING

PROBLEM TO BE SOLVED: To provide a pressure sensor for suppressing reduction in detection accuracy caused by the adhesion of foreign matter to the pressure receiving surface of a diaphragm.SOLUTION: A pressure sensor 100 measures the pressure of a measurement medium including foreign matter 300. The...