PRESSURE SENSOR AND METHOD FOR MANUFACTURING THE SAME

• Main Authors: MURATA MINORU, YOKURA HISANORI, TSUNODA KAZUYUKI
• Format: Patent
• Language: English; Japanese
• Published: 30.06.2016
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; SEMICONDUCTOR DEVICES; TESTING

PROBLEM TO BE SOLVED: To provide a pressure sensor for suppressing reduction in detection accuracy caused by the adhesion of foreign matter to the pressure receiving surface of a diaphragm.SOLUTION: A pressure sensor 100 measures the pressure of a measurement medium including foreign matter 300. The pressure sensor 100 includes a diaphragm 14 and a pressure detection element 16. The diaphragm 14 includes a pressure receiving surface 14a coming into contact with the measurement medium and is deformed according to the pressure of the measurement medium. The pressure detection element 16 outputs a detection signal corresponding to the deformation of the diaphragm 14. The pressure receiving surface 14a has a rugged shape having a plurality of projection parts 20. The distance between the adjacent projection parts 20 is the width of the foreign matter 300 or less.SELECTED DRAWING: Figure 2 【課題】ダイアフラムの受圧面に異物が付着して、検出精度が低下することを抑制する圧力センサを提供する。【解決手段】圧力センサ１００は、異物３００を含む測定媒体の圧力を測定する。圧力センサ１００は、ダイアフラム１４と、圧力検出素子１６と、を備えている。ダイアフラム１４は、測定媒体と接触する受圧面１４ａを有し、測定媒体の圧力に応じて変形する。圧力検出素子１６は、ダイアフラム１４の変形に応じた検出信号を出力する。受圧面１４ａは、複数の突出部２０を有する凹凸形状をなしている。隣り合う突出部２０同士の距離は、異物３００の幅以下とされている。【選択図】図２