MEMS ELEMENT

• Main Authors: TAKAHASHI HIROSHI, USUI TAKAHIDE
• Format: Patent
• Language: English; Japanese
• Published: 08.02.2016
• Subjects: DEAF-AID SETS; ELECTRIC COMMUNICATION TECHNIQUE; ELECTRICITY; LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES; MICROSTRUCTURAL TECHNOLOGY; PERFORMING OPERATIONS; PUBLIC ADDRESS SYSTEMS; TRANSPORTING

PROBLEM TO BE SOLVED: To provide a MEMS element capable of enlarging easily the volume of a back chamber.SOLUTION: Such a structure is adopted that, in order to support a movable electrode 3, the movable electrode 3 is clamped by an insulation member and a spacer 5 instead of clamping the end of the movable electrode by a silicon substrate 1 and the spacer 5, and further the insulation member is clamped by the substrate 1 and the spacer 5. Hereby, such a constitution is obtained that the substrate is retreated furthermore than hitherto, to thereby enlarge the volume of a back chamber.SELECTED DRAWING: Figure 8 【課題】簡便にバックチャンバーの容積を大きくすることができるＭＥＭＳ素子を提供する。【解決手段】可動電極３を支持するため、可動電極の端部をシリコン基板１とスペーサー５とで挟持する代わりに、絶縁部材とスペーサー５とで挟持し、さらに絶縁部材を基板１とスペーサー５とで挟持する構造とすることで、従来より基板を後退させ、バックチャンバーの容積を大きくする構成としている。【選択図】図８