CATADIOPTRIC PROJECTION OBJECTIVE DEVICE HAVING PUPIL MIRROR, PROJECTION EXPOSURE DEVICE AND METHOD

• Main Author: EPPLE ALEXANDER
• Format: Patent
• Language: English; Japanese
• Published: 11.06.2015
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CINEMATOGRAPHY; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; SEMICONDUCTOR DEVICES

PROBLEM TO BE SOLVED: To provide a catadioptric projection objective device for imaging an object field arranged on an object plane of a projection objective device onto an image field arranged on an image plane of the projection objective device.SOLUTION: A catadioptric projection objective device...