CATADIOPTRIC PROJECTION OBJECTIVE DEVICE HAVING PUPIL MIRROR, PROJECTION EXPOSURE DEVICE AND METHOD
PROBLEM TO BE SOLVED: To provide a catadioptric projection objective device for imaging an object field arranged on an object plane of a projection objective device onto an image field arranged on an image plane of the projection objective device.SOLUTION: A catadioptric projection objective device...
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Format | Patent |
Language | English Japanese |
Published |
11.06.2015
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Abstract | PROBLEM TO BE SOLVED: To provide a catadioptric projection objective device for imaging an object field arranged on an object plane of a projection objective device onto an image field arranged on an image plane of the projection objective device.SOLUTION: A catadioptric projection objective device (100) has: a first objective device part (LG1) that has a first pupil surface (P1) configured so as to image a pattern from the object plane into a first intermediate image (IMI1); a second objective device part (HG) that is configured so as to image the first intermediate image (IMI1) into a second intermediate image (IMI2), and has a second pupil surface (P2) optically conjugate with the first pupil surface (P1); and a third objective device part (LG2, LG3 and LG4) that is configured so as to image the second intermediate image (IMI2) into the image plane (IS), and has a third pupil surface (P3) optically conjugate with the first and second pupil surfaces.
【課題】投影対物器械の物体面に配置された物体視野を投影対物器械の像面に配置された像視野上に結像するための反射屈折投影対物器械を提供する。【解決手段】反射屈折投影対物器械(100)は、物体面からのパターンを第1の中間像(IMI1)内に結像させるように構成されて第1の瞳表面(P1)を有する第1の対物器械部(LG1)と、第1の中間像(IMI1)を第2の中間像(IMI2)内に結像させるように構成され、第1の瞳表面(P1)と光学的に共役な第2の瞳表面(P2)を有する第2の対物器械部(HG)と、第2の中間像(IMI2)を像面(IS)内に結像させるように構成され、第1及び第2の瞳表面と光学的に共役な第3の瞳表面(P3)を有する第3の対物器械部(LG2、LG3、LG4)とを有する。【選択図】図1 |
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AbstractList | PROBLEM TO BE SOLVED: To provide a catadioptric projection objective device for imaging an object field arranged on an object plane of a projection objective device onto an image field arranged on an image plane of the projection objective device.SOLUTION: A catadioptric projection objective device (100) has: a first objective device part (LG1) that has a first pupil surface (P1) configured so as to image a pattern from the object plane into a first intermediate image (IMI1); a second objective device part (HG) that is configured so as to image the first intermediate image (IMI1) into a second intermediate image (IMI2), and has a second pupil surface (P2) optically conjugate with the first pupil surface (P1); and a third objective device part (LG2, LG3 and LG4) that is configured so as to image the second intermediate image (IMI2) into the image plane (IS), and has a third pupil surface (P3) optically conjugate with the first and second pupil surfaces.
【課題】投影対物器械の物体面に配置された物体視野を投影対物器械の像面に配置された像視野上に結像するための反射屈折投影対物器械を提供する。【解決手段】反射屈折投影対物器械(100)は、物体面からのパターンを第1の中間像(IMI1)内に結像させるように構成されて第1の瞳表面(P1)を有する第1の対物器械部(LG1)と、第1の中間像(IMI1)を第2の中間像(IMI2)内に結像させるように構成され、第1の瞳表面(P1)と光学的に共役な第2の瞳表面(P2)を有する第2の対物器械部(HG)と、第2の中間像(IMI2)を像面(IS)内に結像させるように構成され、第1及び第2の瞳表面と光学的に共役な第3の瞳表面(P3)を有する第3の対物器械部(LG2、LG3、LG4)とを有する。【選択図】図1 |
Author | EPPLE ALEXANDER |
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DocumentTitleAlternate | 瞳ミラーを有する反射屈折投影対物器械、投影露光装置及び方法 |
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Snippet | PROBLEM TO BE SOLVED: To provide a catadioptric projection objective device for imaging an object field arranged on an object plane of a projection objective... |
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SubjectTerms | APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES |
Title | CATADIOPTRIC PROJECTION OBJECTIVE DEVICE HAVING PUPIL MIRROR, PROJECTION EXPOSURE DEVICE AND METHOD |
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