CATADIOPTRIC PROJECTION OBJECTIVE DEVICE HAVING PUPIL MIRROR, PROJECTION EXPOSURE DEVICE AND METHOD

• Main Author: EPPLE ALEXANDER
• Format: Patent
• Language: English; Japanese
• Published: 11.06.2015
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CINEMATOGRAPHY; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; SEMICONDUCTOR DEVICES

PROBLEM TO BE SOLVED: To provide a catadioptric projection objective device for imaging an object field arranged on an object plane of a projection objective device onto an image field arranged on an image plane of the projection objective device.SOLUTION: A catadioptric projection objective device (100) has: a first objective device part (LG1) that has a first pupil surface (P1) configured so as to image a pattern from the object plane into a first intermediate image (IMI1); a second objective device part (HG) that is configured so as to image the first intermediate image (IMI1) into a second intermediate image (IMI2), and has a second pupil surface (P2) optically conjugate with the first pupil surface (P1); and a third objective device part (LG2, LG3 and LG4) that is configured so as to image the second intermediate image (IMI2) into the image plane (IS), and has a third pupil surface (P3) optically conjugate with the first and second pupil surfaces. 【課題】投影対物器械の物体面に配置された物体視野を投影対物器械の像面に配置された像視野上に結像するための反射屈折投影対物器械を提供する。【解決手段】反射屈折投影対物器械（１００）は、物体面からのパターンを第１の中間像（ＩＭＩ１）内に結像させるように構成されて第１の瞳表面（Ｐ１）を有する第１の対物器械部（ＬＧ１）と、第１の中間像（ＩＭＩ１）を第２の中間像（ＩＭＩ２）内に結像させるように構成され、第１の瞳表面（Ｐ１）と光学的に共役な第２の瞳表面（Ｐ２）を有する第２の対物器械部（ＨＧ）と、第２の中間像（ＩＭＩ２）を像面（ＩＳ）内に結像させるように構成され、第１及び第２の瞳表面と光学的に共役な第３の瞳表面（Ｐ３）を有する第３の対物器械部（ＬＧ２、ＬＧ３、ＬＧ４）とを有する。【選択図】図１